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Topic: Sputtering

Results

Asymmetric Interfacial Perpendicular Magnetic Anisotropy in Pt/Co/Pt Trilayers

2011 / IEEE
By: Bandiera, S.; Dieny, B.; Rodmacq, B.B.; Sousa, R.R.;

High Frequency Characteristics of Synthetic Antiferromagnetic Coupling FeCoN Sandwich Films

2011 / IEEE
By: Luran Zhang; Wenhui Zhang; Xi Liu; Ying Wang; Jianmin Bai; Dan Wei; Fulin Wei;

Metal Ionization in a High-Power Pulsed Sputtering Penning Discharge

2011 / IEEE
By: Ehiasarian, A.P.; Yukimura, K.; Azuma, K.; Nakano, S.; Ogiso, H.;

Detached Glow Above a Titanium Hollow Cathode Sputter Source

2011 / IEEE
By: Niedrist, R.; Schrittwieser, R.;

Evaluation of Thin Film Noise Suppressor Applied to Noise Emulator Chip Implemented in 65 nm CMOS Technology

2011 / IEEE
By: Nagata, M.; Sasaki, Y.; Yoshikawa, K.; Sasaki, Y.; Yamaguchi, M.; Endo, Y.; Kodate, W.; Muroga, S.;

AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering

2011 / IEEE
By: Garcia-Garcia, J.; Nieto-Perez, M.; Gonzalez, J.J.; Pacheco-Pacheco, M.; Rivera-Rodriguez, C.; Valdivia-Barrientos, R.; Pacheco-Sotelo, J.;

Biased Atmospheric, Sub-Atmospheric, and Low-Pressure Air Plasmas for Material Surface Improvements

2011 / IEEE
By: de Moraes Oliveira, R.; Kostov, K.G.; Ueda, M.; Bacci Fernandes, B.; Mello, C.B.; da Silva Savonov, G.;

Influence of Sputtering Gas Pressure on High-Frequency Soft Magnetic Properties of FeCoN Thin Film

2011 / IEEE
By: Qijun Huang; Zhiqin Liao; Feng Xu; Shandong Li; Chong Kim Ong;

Enhancement of bcc-FeCo(100) Crystalline Orientation by Introducing Oxygen

2011 / IEEE
By: Mamiya, K.; Kubota, Y.; Miyamoto, N.; Nakagawa, S.;

Integration of Tantalum Pentoxide Capacitors With Through-Silicon Vias

2011 / IEEE
By: Burkett, S.L.; Schaper, L.W.; Glover, M.D.; Jacob, S.; Yang Liu; Tegueu, A.K.;

Influence of Tin Deposition Methods on Tin Whisker Formation

2011 / IEEE
By: Pinol, L.A.; Clatterbaugh, G.; Coles, G.; Deacon, R.; Lee, D.M.; Charles, H.K.; Melngailis, J.;

Performance Evaluation of Textile-Based Electrodes and Motion Sensors for Smart Clothing

2011 / IEEE
By: Min Joo Paik; Keesam Jeong; Gilsoo Cho; Moonsoo Sung; Youngeun Kwun;

Effect of the Sputtering Power Density on Microstructure and Magnetic Properties of CoFeSiB Thin Films

2011 / IEEE
By: Chiriac, H.; Lupu, N.; Grigoras, M.;

High-Frequency Soft Magnetic Properties of Isotropic Co-Al-N Films

2011 / IEEE
By: Ohnuma, S.; Kijima, H.; Masumoto, H.;

Effect of Using Oblique-Incidence Deposited Ru Interlayers Deposited by Evaporation and Sputtering on Recording Characteristics of Perpendicular Media

2011 / IEEE
By: Inoue, K.; Saito, S.; Takahashi, M.;

Sputtering of SmCo Thin Films and Integration Into a Ferrofluidic Microactuator

2011 / IEEE
By: Hoheisel, D.; Jue Chen; Rising, L.;

Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires

2011 / IEEE
By: Chen, H.C.; Chen, J.S.C.; Jeng, E.S.; Kao, H.K.; Jian, S.J.; Liang, Y.L.; Chen, M.C.; Laksana, C.P.; Tzou, A.T.;

Deposition of Inclined Orientation Film Using Collimated Sputtering

2011 / IEEE
By: Honda, N.; Honda, A.;

Thin-Film Transistors Based on Indium Molybdenum Oxide Semiconductor Layers Sputtered at Room Temperature

2011 / IEEE
By: Barquinha, P.; Goncalves, G.; Parthiban, S.; Saji, K.J.; Elangovan, E.; Fortunato, E.; Martins, R.;

Performance Variation According to Device Structure and the Source/Drain Metal Electrode of a-IGZO TFTs

2012 / IEEE
By: Eun Suk Hwang; Un Ki Kim; Yoon Jang Chung; Yoonsoo Jung; Jisim Jung; Byoung Keon Park; Cheol Seong Hwang; Sang Ho Rha; Jung-Hae Choi; Tae Joo Park;

Magnetic Properties and Magnetic Domain Structures Evolution Modulated by CoFeB Layer in [Pd/Co]/CoFeB/MgO/CoFeB/[Co/Pd] Perpendicular MTJ Films

2012 / IEEE
By: Han, X.F.; Ando, Y.; Shi, D.W.; Naganuma, H.; Yu, T.;

Magnetic Properties of Enhanced Permeability Dielectrics for Nanomagnetic Logic Circuits

2012 / IEEE
By: Niemier, M.; Hu, X.S.; Csaba, G.; Sankar, V.K.; Peng Li; Bernstein, G.H.; Porod, W.;

Spin Transfer Torque Switching of Amorphous GdFeCo With Perpendicular Magnetic Anisotropy for Thermally Assisted Magnetic Memories

2012 / IEEE
By: Iwata, S.; Kato, T.; Bing Dai; Tsunashima, S.;

Smoother Substrate Deposition Designs and Process Emulations of DC Magnetron Sputters

2012 / IEEE
By: Cheng-Tsung Liu; Chang-Chou Hwang; Chih-Wen Chang;

Flat Surface Percolated Perpendicular Media With Metal Pinning Sites

2012 / IEEE
By: Takagishi, M.; Takeo, A.; Onitsuka, T.; Oikawa, S.;

Magnetic Force Microscope Probes With High Resolution by Soft Magnetic Vortex

2012 / IEEE
By: Xiaoxi Liu; Isomura, S.; Morisako, A.;

Low-Temperature Fabrication and Characteristics of Lanthanum Indium Zinc Oxide Thin-Film Transistors

2012 / IEEE
By: Ho-Nyeon Lee; Chang Jung Kim; Sang Wook Kim; Jae Chul Park;

Nucleation and Resistivity of Ultrathin TiN Films Grown by High-Power Impulse Magnetron Sputtering

2012 / IEEE
By: Gudmundsson, J.T.; Olafsson, S.; Ingason, A.S.; Magnus, F.;

Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient Between Fused Silica and Metallic Materials

2012 / IEEE
By: Jinxing Liang; Shuo Lin; Xuefeng Li; Ueda, T.; Oigawa, H.; Yupeng Zhang;

Influence of the Magnetic Field Topology on Hall Thruster Discharge Channel Wall Erosion

2012 / IEEE
By: Haibin Tang; Yunkui Sun; Kan Xie; Zuo Gu; Chang Liu;

Low-Voltage Junctionless Oxide-Based Thin-Film Transistors Self-Assembled by a Gradient Shadow Mask

2012 / IEEE
By: Hongliang Zhang; Jumei Zhou; Guodong Wu; Qing Wan; Liqiang Zhu;

Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates

2012 / IEEE
By: Wang, Y.; Zhang, S.; Wasa, K.;

Thermally Robust Ni Germanide Technology Using Cosputtering of Ni and Pt for High-Performance Nanoscale Ge MOSFETs

2012 / IEEE
By: Hong-Sik Shin; Min-Ho Kang; Jammy, R.; Hi-Deok Lee; Jung-Ho Yoo; Majhi, P.; Jung-Woo Oh; Ga-Won Lee;

Nonlinear Absorption at Optical Telecommunication Wavelengths of InN Films Deposited by RF Sputtering

2012 / IEEE
By: Mangeney, J.; Monteagudo-Lerma, L.; Valdueza-Felip, S.; Naranjo, F.B.; Julien, F.H.; Gonzalez-Herraez, M.;

Effects of Annealing Temperature and Gas on Pentacene OTFTs With HfLaO as Gate Dielectric

2012 / IEEE
By: Choi, H.W.; Liu, Y.R.; Deng, L.F.; Lai, P.T.; Che, C.M.; Xu, J.P.;

Top-Gate GaN Thin-Film Transistors Based on AlN/GaN Heterostructures

2012 / IEEE
By: Meng Zhang; Wei Zhou; Rongsheng Chen; Hoi Sing Kwok;

Characteristics of Thin-Film Transistors Fabricated on Fluorinated Zinc Oxide

2012 / IEEE
By: Zhi Ye; Man Wong;

Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O₃-PZT thin films

2012 / IEEE
By: Wasa, K.; Kotera, H.; Kanno, I.; Matsushima, T.; Yamamoto, T.; Nishida, K.; Adachi, H.;

Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic Sensor

2012 / IEEE
By: Prasad, M.; Shekhar, C.; Khanna, V.K.; Sahula, V.; Yadav, R.P.;

Effects of Prestrain Applied to a Polyethylene Terephthalate Substrate Before the Coating of Al-Doped ZnO Film on Film Quality, Electrical Properties, and Pop-In Behavior During Nanoindentation

2012 / IEEE
By: Jen-Fin Lin; Po-Tsung Hsieh; Bo-Hsiung Wu; Chang-Fu Han; Tse-Chang Li;

Cold Cathode Sputtering in Glow Discharges

2012 / IEEE
By: Barratt, D.S.; Alberts, I.L.; Ray, A.K.;

Sleep and aes applied to solid state devices and materials

1974 / IEEE
By: Haas, G.A.; Gray, H.F.;

Study of recirculating induction accelerator as drivers for heavy ion fusion

1992 / IEEE / 000-0-0000-0000-0
By: Coffield, F.; Deadrick, F.; Barnard, J.J.; Shay, H.D.; Judd, D.L.; Yu, S.S.; Wilson, J.; Sharp, W.M.; Reginato, L.L.; Brooks, A.L.; Paul, A.C.; Newton, M.A.; Neil, V.K.; Kirbie, H.C.; Griffith, L.V.;

Calculation of ion beam sputtering yield of solid sample with cylindrical cavities on its surface

2000 / IEEE
By: Bondarenko, G.G.; Prassitski, V.V.; Kristya, V.I.;

State of the art fully water cooled plasma DC generator with ultra fast arc quenching circuit for photovoltaic applications

2011 / IEEE / 978-1-4244-9312-8
By: Zyskowski, L.; Sobczuk, D.; Gedroyc, K.; Jasinski, M.; Zelechowski, M.;

Conducting force microscopy and hole charging in Ge islands grown by RF sputtering

2011 / IEEE / 978-1-4577-0378-2
By: Dhar, A.; Singha, R.K.; Das, S.; Ray, S.K.;

Diffusion behavior and mechanism of co-sputtering metals as bonding materials for 3D IC interconnects during annealing treatment

2011 / IEEE / 978-1-4577-0378-2
By: Shih, J.Y.; Hsu, S.Y.; Chen, K.N.;

Smoother Mo films for molded FEAs by addition of N2 to Ar sputter gas

2011 / IEEE / 978-3-00-035081-8
By: Mustonen, A.; Kirk, A.E.; Tsujino, S.; Gobrecht, J.; Ritter, S.; Pomjakushina, E.;

Structure design and fabrication of a bistable microvalve

2011 / IEEE / 978-1-4244-9439-2
By: Boxiong Wang; Bocong Yang; Schomburg, W.K.;

Deposition of transparent conducting CdO on flexible PET substrate

2011 / IEEE / 978-1-61284-774-0
By: Zhenguo Ji; Qiuhong Wu; Junhua Xi; Yueteng Yao;

Gate capacitance scaling and graphene field-effect transistors with ultra-thin top-gate dielectrics

2011 / IEEE / 978-1-61284-244-8
By: Lee, K.; Fallahazad, B.; Tutuc, E.; Corbet, C.; Kim, S.;

Using bi-layer structure to enhance the electrochromic properties of WO3: Self-organized nanotube thin films on DC sputter thin films

2011 / IEEE / 978-1-4577-0378-2
By: Ho Chang; Chin-Guo Kuo; Cheng-Fu Yang; Ya-Chieh Tung; Wen-Ray Chen;

Negative dispersion in �-Mo2N/Si(100) films

2011 / IEEE / 978-1-61284-795-5
By: Khasanov, T.; Atuchin, V.V.; Senchenko, E.S.; Pokrovsky, L.D.; Kochubey, V.A.;

The influence of physical and electrical properties in HfO2 thin film with different lanthanum doping position

2011 / IEEE / 978-1-4577-0378-2
By: Hsu, H.W.; Liu, C.H.; Cheng, C.P.; Lin, J.Y.; Chen, H.W.; Juan, P.C.; Chien, Y.S.; Huang, H.S.;

Ta/Si bilayer thin film for write-once blue laser optical recording media

2011 / IEEE / 978-1-4577-0378-2
By: Hsiao, C.H.; Kuo, P.C.; Ou, S.L.; Lee, C.T.; Tsai, T.L.; Chang, H.F.; Yeh, C.Y.; Chen, S.C.;

Chloride ion selective electrode for detection of low chloride ion concentration

2011 / IEEE / 978-1-4577-0378-2
By: Jung-Chuan Chou; Chien-Cheng Chen; Chun-Hung Liu; Meng-Wei Su;

The analysis of AZO films made by a magnetic controlled DC sputtering system

2011 / IEEE / 978-1-4577-0378-2
By: Chung-Hsuan Lin; Yue-Xun Zhang; Neng Fu Shih;

Investigation on the sensitivity of TiO2: Ru pH sensor by Taguchi design of experiment

2011 / IEEE / 978-1-4577-0378-2
By: Jung-Chuan Chou; Cheng-Wei Chen; Shu-Ying Yang;

Effects of Cu-dopant on properties of CdTe thin films

2011 / IEEE / 978-1-61284-774-0
By: Zhenguo Ji; Junhua Xi; Guochang Wang;

Fabrication of double nanohoneycombs (Al/SiO2) with controllable size using nanosphere lithography

2011 / IEEE / 978-1-4577-0378-2
By: Tzung-Chen Wu; Chao-Te Lee; Sin-Liang Ou; Chien-Nan Hsiao; Chi-Chung Kei; Wen-Hao Cho;

Fabrication of vanadium oxide for uncooled FPAs using dual magnetron AC sputtering

2011 / IEEE / 978-1-61284-088-8
By: Pires, N.; Zhaochu Yang; Tao Dong; Lei Zhang; Yulong Zhang;

ZnO thin films produced by the RF magnetron sputtering

2011 / IEEE / 978-1-61284-088-8
By: Yangan Yan; Jing Wang; Huawa Yu; Yali Du; Hanchen Liu; Bin Gao; Xin Wang;

Growth of high quality BiFeO3 thin films by dual ion beam sputtering

2011 / IEEE / 978-1-4577-1163-3
By: Nakashima, S.; Okuyama, M.; Kanashima, T.; JungMin Park; Shimizu, M.; Tsujita, Y.; Kobune, M.; Nishioka, H.; Fujisawa, H.; Seto, S.;

Influence of poling on RF and pulsed DC sputtered PZT thin films

2011 / IEEE / 978-1-4577-1163-3
By: Karakaya, K.; Jambunathan, M.; Van Schaijk, R.; Vullers, R.; Elfrink, R.;

XRR and FE-SEM studies of nano-multi-layer ceramic thin films with periodic structures

2011 / IEEE / 978-1-61284-777-1
By: Hua-Chung Tzou; Bo-Ying Chen; Jong-Hong Lu;

Carbon nano partitions for heat dissipation

2011 / IEEE / 978-1-61284-777-1
By: Tsai, J.T.H.; Kuo, L.C.J.;

Effect of different annealing methods on the properties of PSTT thin films

2011 / IEEE / 978-1-4577-1163-3
By: Xiaolong Chen; Xuedong Li; Dongxu Yan; Jianguo Zhu; Dingquan Xiao; Hong Liu;

Multilayer thin-film capacitors fabricated by radio-frequency magnetron sputtering

2011 / IEEE / 978-1-4577-1163-3
By: Kotera, H.; Kanno, I.; Yokokawa, R.; Imamiya, Y.;

Studies on the influence of sputtering parameters on magneto-optical properties of GdTbFeCo thin films

2011 / IEEE / 978-1-61284-088-8
By: Zhixin Huang; Jian-bo Shao; Lei Yang; Ji-hua Guo;

The fabrication of array wind speed and direction sensor based on Pt film

2011 / IEEE / 978-1-4577-0399-7
By: Feng Qiaohua; Sun Lining; Shi Yunbo;

Analysis and design of magnetic mesa-structure array for ensemble detection applications of nuclear spins

2011 / IEEE / 978-1-61284-777-1
By: Wang, D.F.; Xiaoqiang Li; Maeda, R.;

Virtual metrology algorithm for TFT-LCD manufacutring process

2011 / IEEE / 978-1-61284-181-6
By: Bi-Qi Sheng; Tian-Hong Pan;

Correlation of Intrinsic Thin Film Stress Evolution and IMC Growth with Whisker Growth

2011 / IEEE / 978-1-61284-651-4
By: Street, J.; Bitner, T.; Starman, V.; Crandall, E.R.; Zhao, Z.; Rodekohr, C.L.; Jackson, R.; Bozack, M.J.; Flowers, G.T.; Martens, R.;

A potentiometric oxygen sensor based on LaF3 using Pt micro grid as the sensing electrode

2011 / IEEE / 978-1-61284-777-1
By: Hairong Wang; Guoliang Sun; Junqiang Ren; Zhuangde Jiang;

Model assisted process control in micro- and nano-fabrication using Focused Ion Beam

2011 / IEEE / 978-1-4577-2112-0
By: Marson, S.; Stoyanov, S.;

Microstructures and optical absorption of Ti-doped ZnO films

2011 / IEEE / 978-1-4577-0321-8
By: Ligang Ma; Yingfeng Li; Shuyi Ma; Haixia Chen; Xingli Huang;

Compliant Carbon Nanotube-Metal Contact Structures

2011 / IEEE / 978-1-61284-651-4
By: Martens, R.; Yaglioglu, O.; Slocum, A.H.; Anyuan Cao;

Effect of Ar/O2 gas ratio and annealing temperature on the structure and properties of ZnO film

2011 / IEEE / 978-1-4244-8161-3
By: Liu Juan; Zhao Xinghai; Xi Shiwei; Gao Yang; Chen Yinghui;

Design of a rectangular DC magnetron sputtering system with controllable target erosion patterns

2011 / IEEE / 978-1-4577-1043-8
By: Cheng-Tsung Liu; Chih-Wen Chang; Hsiao-Chun Yeh;

Development of cost-effective biocompatible packaging for microelectronic devices

2011 / IEEE / 978-1-4577-1589-1
By: Qian, K.; Van Hoof, C.; de Beeck, M.O.; Velenis, D.; Fiorini, P.; Malachowski, K.;

Properties of ferroelectric thin film capacitor for embedded passive applications

2011 / IEEE / 978-1-4577-1769-7
By: Shuhui Yu; Lixi Wan; Ning Zhao;

The copper stud bumping shaping simulation based on thermal-solid couple analysis

2011 / IEEE / 978-1-4577-1769-7
By: Zhang Jin; Zhang Shanshan;

Employment of sputtered Ni-Zn films for under bump metallization with Sn-3.0Ag-0.5Cu solder attached during liquid reactions

2011 / IEEE / 978-1-4577-1769-7
By: Jenq-Gong Duh; Hsiu-Min Lin; Su-Yueh Tsai;

3R on nickel silicidation: Reduction of CoO for Ni-Pt sputtering

2011 / IEEE / 978-1-4577-1647-8
By: Futase, T.; Tanimoto, H.;

Amorphous molybdenum oxide nanorods for electrochromic applications

2011 / IEEE / 978-963-8111-77-7
By: Kumar, R.V.; Navas, I.; Pillai, V.P.M.; Maniammal, K.;

PMN-PT piezoelectric material and related applications in Silicon-integrated devices like microactuators and energy harvesters

2011 / IEEE / 978-1-61284-172-4
By: Chaillet, N.; Lutz, P.; Rakotondrabe, M.; Agnus, J.; Ivan, I.A.;

Simulation of ionizing radiation induced effects in nanoscale semiconductor material

2011 / IEEE / 978-1-61284-846-4
By: Fuei Pien Chee; Salleh, S.; Amir, H.F.A.;

Nanofibrous zinc oxide films synthesized by magnetron sputtering

2011 / IEEE / 978-1-61284-172-4
By: Park, S.; Chai, G.; Chow, L.; Tiginyanu, I.; Schulte, A.; Ursaki, V.; Popescu, S.; Lupan, O.; Ghimpu, L.;

Processing technology of embedded thin-film resistor materials

2011 / IEEE / 978-1-4673-0149-7
By: ShuHui Yu; XiaoLiang Zeng; Tao Zhao; Rong Sun; Lifei Lai;

Manufacturing of large area high mobility AM-TFT backplanes using IGZO rotary sputtering targets

2011 / IEEE / 978-1-4244-8939-8
By: Dong-Kil Yim; Yan Ye; Hosokawa, A.; Graw, O.; Gaur, A.; You, H.; Scheer, E.; Lim, R.;

Crystallization study for MgO in magnetic tunnel junction structure

2011 / IEEE / 978-1-4577-1997-4
By: Yi-Men Zhang; Hui Guo; Da-Qing Xu; Yu-Ming Zhang; Yong-Le Lou; Yang Zhao; Ren-Xu Jia;

Direct plated copper technology for high brightness LED packaging

2011 / IEEE / 978-1-4577-1389-7
By: Chiu, M.; Jiang, T.; Wei, V.; Ru, H.;

Annealing effect of niobium pentoxide for low voltage electrowetting on dielectric (EWOD)

2011 / IEEE / 978-1-4577-1389-7
By: Fu, C.; Hsiu-Hsiang Chen;

High performance reactive sputtering deposited ZnO thin-film transistors on transparent substrate

2011 / IEEE / 978-1-4577-1997-4
By: Yi Wang; Lei Sun; Dedong Han; Shaojuan Li; Shengdong Zhang; Quqi Han;

Effects of different Ar/O2 ratios on the electrical properties of CuPc-based TFTs with ZrO2 gate dielectric

2011 / IEEE / 978-1-4577-1997-4
By: Helander, M.G.; Greiner, M.T.; Tang, W.M.; Ng, W.T.; Lu, Z.H.;

Nucleation sites for multilayer graphene on nickel catalyst

2011 / IEEE / 978-1-4577-1516-7
By: Hauri, K.; Fu, R.; Meissner, G.; Kilpatrick, S.; Nichols, B.M.; Zakar, E.;

Characterization of silicon nitride films for a silicon nanowire-based biosensor

2011 / IEEE / 978-1-4577-1516-7
By: Bergstrom, P.L.; Daw Don Cheam; Daunais, T.M.; Friedrich, C.R.;

Optical fiber refractometers based on sputtered indium tin oxide coatings

2011 / IEEE / 978-1-4577-0167-2
By: Del Villar, I.; Hernaez, M.; Zamarreno, C.R.; Lopez, S.; Matias, I.R.; Arregui, F.J.;

Low-frequency noise in high-k LaLuO3/TiN MOSFETs

2011 / IEEE / 978-1-4577-1756-7
By: Olyaei, M.; Malm, B.G.; Litta, E.D.; Hellstrom, P.-E.; Ostling, M.;

Structure and Morphology Evolution of TiO2 Films Grown by Sputtering

2011 / IEEE / 978-1-4577-2037-6
By: Barhai, P.K.; Pradhan, S.K.; Pradhan, S.S.;

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