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Topic: Dc Magnetron Sputtering

Results

High Frequency Characteristics of Synthetic Antiferromagnetic Coupling FeCoN Sandwich Films

2011 / IEEE
By: Luran Zhang; Wenhui Zhang; Xi Liu; Ying Wang; Jianmin Bai; Dan Wei; Fulin Wei;

Time-Resolved Magnetization Dynamics and Damping Constant of Sputtered Co/Ni Multilayers

2011 / IEEE
By: Matsumoto, Y.; Kato, T.; Iwata, S.; Tsunashima, S.; Okamoto, S.; Nishizawa, N.; Kitakami, O.; Kikuchi, N.;

Perpendicular Anisotropy and Gilbert Damping in Sputtered Co/Pd Multilayers

2012 / IEEE
By: Tsunashima, S.; Kashima, S.; Matsumoto, Y.; Kato, T.; Okamoto, S.; Kitakami, O.; Iwata, S.; Kikuchi, N.;

Nano-Patterning of GMR Spin Valves by FIB Technique

2012 / IEEE
By: Herr, U.; Riedmuller, B.;

Effect of annealing on adhesion for Ti/Ni/Ag electrodes

2011 / IEEE / 978-1-4244-9439-2
By: Huibin Qin; Jiangxia Deng; Liang Zheng; Jun Wu; Weiguang Xiang; Zhihua Ying;

Deposition of PbO thin films and its X-ray photoconductive properties

2011 / IEEE / 978-1-61284-774-0
By: Zhenguo Ji; Junhua Xi; Leilei Li;

Evaluation of TiO2/SiO2 dielectric thin films to overcome the challenges of CMOS scaling

2011 / IEEE / 978-1-61284-846-4
By: Arya, S.K.; Ghlwat, M.; Rathee, D.;

Evaluation of TiO2/SiO2 dielectric thin films to overcome the challenges of CMOS scaling

2011 / IEEE / 978-1-61284-846-4
By: Ghlwat, Mukesh; Rathee, Davinder; Arya, Sandeep K.;

The influence of gate bias and structure on the CO sensing performance of SiC based field effect sensors

2011 / IEEE / 978-1-4244-9289-3
By: Pearce, R.; Darmastuti, Z.; Andersson, M.; Spetz, A.L.;

Deposition temperature effect on a-Si:H produced by DC magnetron sputtering

2011 / IEEE / 978-1-4244-9965-6
By: Santana, R.J.; Moura, T.D.O.; Guimaraes, G.R.; Miranda, D.O.; Proenca, R.T.; Diniz, A.S.C.; Branco, J.R.T.;

Effect of Film Thickness on Magnetic Properties of FePt Thin Films Deposited on Amorphous ${\rm SiO}_{2}$ Substrate Directly

2011 / IEEE
By: Lin, G.P.; Kuo, P.C.; Shen, C.L.; Huang, K.T.; Chen, S.C.;

Investigation into microstructural and electrical characteristics of Ni-Cr-Si thin-film resistors deposited in Al2O3 substrate using DC and RF magnetron sputtering

2014 / IEEE
By: Jap, Franco; Lee, Wen-Hsi; Chiang, Chen-Su;

Sputtered Al-Ti electrodes for high power durable SAW devices

1988 / IEEE
By: Yamada, J.; Iwama, A.; Yuhara, A.; Hosaka, N.;

DC-magnetron sputtered CoNiTa for high density longitudinal recording

1990 / IEEE
By: Fisher, R.D.; Khan, M.R.; Heiman, N.;

Sputtered carbon on particulate media

1990 / IEEE
By: Wu, A.; Ouano, G.; Nayak, V.; Lee, J.; Hilden, M.;

Underwater ultrasonic transducers employing ZnO-film/Al-foil composite structure

1989 / IEEE
By: Suzuki, H.; Hashimoto, K.; Yamaguchi, M.; Yamamoto, M.;

Effects of bias-sputtering on magnetron-sputtered magneto-optical recording media

1988 / IEEE
By: Shieh, H.-P.D.; Lee, J.-W.; Kryder, M.H.;

Oxidation and corrosion resistance of TbFeCoPt alloys films

1988 / IEEE
By: Hatwar, T.K.; Majumdar, D.;

Carbon overcoat and the process dependence on its microstructure and wear characteristics

1988 / IEEE
By: Siekhaus, W.; Salmeron, M.; Ogletree, D.F.; Marchon, B.; Veirs, K.; Khan, M.R.; Smallen, M.; Smith, S.; Fisher, R.D.; Heiman, N.; Hughes, G.F.;

Effect of argon sputtering pressure on the magnetic properties and morphology of TbFeCo films

1988 / IEEE
By: Palumbo, A.C.; Hatwar, T.K.; Stinson, D.G.;

Experimental determination of the magneto-optic constants of rare-earth transition-metal alloys

1988 / IEEE
By: Jubb, N.J.; Haynes, M.K.;

Magnetic properties and read-write characteristics of multilayer films on a glass substrate

1988 / IEEE
By: Sono, K.; Ishii, N.; Enjoji, K.; Tsuno, T.; Katayama, S.;

Low-loss lumped-element capacitors for superconductive integrated circuits

1989 / IEEE
By: Bhushan, M.; Anderson, A.C.; Green, J.B.;

Process control for the low temperature deposition of niobium-nitride thin films

1989 / IEEE
By: Brogan, W.T.; Lichtenwalner, D.J.; Anderson, A.C.;

A simple method for preparing superconducting high T/sub c/ thin films

1989 / IEEE
By: Signorelli, E.; Vaglio, R.; Nigro, A.; Romano, P.; Gray, K.E.;

Study of CoNbFe films deposited by DC magnetron sputtering

1991 / IEEE
By: Pan, G.; Spencer, A.G.; Howson, R.P.;

Investigation of coercive squareness in TbFeCo films

1991 / IEEE
By: Kryder, M.H.; Merchant, A.A.;

New thin film fabrication technique using a substrate excited by SAW

1990 / IEEE
By: Yamada, J.; Wakiyama, T.; Shimatsu, T.; Fujita, A.; Takahashi, M.; Shiba, T.;

Soft magnetism of crystalline Fe based alloy sputtered films

1990 / IEEE
By: Takahashi, M.; Shimatsu, T.;

Radiation resistance and comparative performance of ITO/InP and n/p InP homojunction solar cells

1988 / IEEE
By: Hart, R.E., Jr.; Swartz, C.K.; Weinberg, I.; Coutts, T.J.;

Conducting metallic oxide contacts on superconducting YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films

1992 / IEEE
By: Jia, Q.-X.; Anderson, W.A.;

Development of a planarized Al-Si contact filling technology

1990 / IEEE
By: Yoda, T.; Ushiku, Y.; Ono, H.;

Investigation of the tunnel barrier in Nb-based junctions prepared by sputtering and electron beam evaporation

1991 / IEEE
By: Gundlach, K.H.; Kohlstedt, H.; Schneider, A.;

Fabrication of Eu/sub 1/Ba/sub 2/Cu/sub 3/O/sub y/ thin films and tunnel junctions by magnetron sputtering

1991 / IEEE
By: Asano, H.; Michikami, O.; Asahi, M.; Yonezawa, H.;

Textured ZnO:Al films for solar cells by DC-magnetron sputtering in water vapor plasma

1991 / IEEE / 0-87942-636-5
By: Kunioka, A.; Ohkubo, Y.; Nakada, T.;

Magnetization of Sm-Fe-N thin films with in-plane anisotropy

1992 / IEEE
By: Wang, D.; Hadjipanayis, G.C.; Sellmyer, D.J.;

Comparison between two kinds of Y-Ba-Cu-O films deposited from single sintered targets with Ba-poor 1:2:3 (=Y:Ba:Cu) compositions

1993 / IEEE
By: Ohtsuka, K.; Suzuki, M.; Morita, H.;

Field emission diodes with tungsten wedge cathode

1991 / IEEE / 0-7803-0243-5
By: Zeto, R.J.; Kim, J.M.; Carr, W.N.; Mulford, C.D.; Zakar, E.S.;

Structure and mechanical properties of hydrogenated carbon films prepared by magnetron sputtering (for magnetic discs)

1991 / IEEE
By: Vo, P.N.; Marchon, B.; Ager, J.W., III; Khan, M.R.;

A new series of quaternary Co-alloys for high density rigid-disk applications

1991 / IEEE
By: Tsai, H.; Lal, B.B.; Eltoukhy, A.;

Giant magnetoresistance and antiferromagnetically coupled Co fraction in Co/Cu multilayers with varying number of periods

1994 / IEEE
By: Van Den Berg, H.A.M.; Rupp, G.;

Highly sensitive giant magnetoresistance in NiFe/(Ni/Fe/Cu)/sub n//NiFe thin films

1994 / IEEE
By: Miyauchi, T.; Kouchiyama, A.; Watanabe, K.;

Microstructure and magnetic properties of FeTaN films

1994 / IEEE
By: Barnard, J.A.; Haftek, E.;

High coercivity FeSmN thin films for longitudinal magnetic recording media

1994 / IEEE
By: Wang, D.; Doyle, W.D.;

Nanostructures of Sm-Co on Cr thin films

1994 / IEEE
By: Yu, M.J.; Malhotra, S.; Shan, Z.S.; Robertson, B.W.; Renukunta, S.K.; Liu, Y.; Sellmyer, D.J.; Liou, S.H.;

Tribological and recording performance of carbon-coated thin film head sliders on unlubricated and lubricated thin film media

1994 / IEEE
By: Geng Wang; Ga-Lane Chen; Judy, J.H.; Sivertsen, J.M.; Tse-An Yeh;

The role of magnet arrangement in synthesis of YBCO thin films by on-axis DC magnetron sputtering

1995 / IEEE
By: Yeh, W.J.; Zhang, Y.Z.;

Critical currents and thermal activation in a-axis oriented EuBa/sub 2/Cu/sub 3/O/sub 7/ thin films

1995 / IEEE
By: Vicent, J.L.; Martin, J.I.; Velez, M.;

YBaCuO thin films on sapphire up to 2-inch-diameter for microwave applications

1995 / IEEE
By: Belov, R.K.; Svishev, A.A.; Gaponov, S.V.; Gusev, S.A.; Klimov, A.Yu.; Kluenkov, E.; Morozov, K.V.; Nozdrin, Y.N.; Parafin, A.E.; Pavlov, S.A.; Reznik, A.N.; Talanov, V.V.; Varganov, A.V.; Volodin, B.A.; Vorobyev, A.K.; Vysheslavtzev, P.P.; Abramov, V.I.; Tagunov, B.B.; Vendik, I.B.; Osadchiy, V.N.; Sherman, V.O.; Drozdov, Y.N.;

Effects of aluminum over-layer thickness on characteristics of niobium tunnel junctions fabricated by DC magnetron sputtering

1995 / IEEE
By: Nagashima, H.; Nakayama, A.; Okabe, Y.; Shimada, J.;

Stress and source conditions of DC magnetron sputtered Nb films

1995 / IEEE
By: Amos, R.S.; Lichtenberger, A.W.; Huang, H.H.; Breyer, P.E.;

Fabrication of high quality, deep-submicron Nb/AlO/sub x//Nb Josephson junctions using chemical mechanical polishing

1995 / IEEE
By: Lukens, J.E.; Siyuan Ran; Bhushan, M.; Bao, Z.;

Giant magnetoresistance in CoFe/Cu multilayers with different buffer layers and substrates

1995 / IEEE
By: Gangopadhyay, S.; Parker, M.R.; Barnard, J.A.; Kief, M.T.; Shen, J.X.;

GMR in sputtered Co/sub 90/Fe/sub 10//Ag multilayers

1995 / IEEE
By: Jarratt, J.D.; Barnard, J.A.;

Anisotropic exchange for NiFe films grown on epitaxial NiO

1995 / IEEE
By: White, R.L.; Matsuyama, H.; Chih-Huang Lai; Anthony, T.C.;

The effect of nitrogen on soft magnetism in FeTaN films

1995 / IEEE
By: Inturi, V.R.; Barnard, J.A.;

Corrosion behavior of high coercivity FeSmN thin films for longitudinal magnetic recording media

1995 / IEEE
By: Doyle, W.D.; Wang, D.; Warren, G.W.; Saffarian, H.M.;

The elastic constants of sputtered aluminum nitride films

1995 / IEEE / 0-7803-2940-6
By: Liaw, H.M.; Hickernell, F.S.; Carlotti, G.; Verona, E.; Socino, G.; Palmieri, L.;

A study of the interface phenomena of TiW/Si and TiN/Ti/Si

1995 / IEEE / 0-7803-3062-5
By: Sangchul Shim; Eungsoo Kim; Soonkwon Lim; Changbum Jeong;

Enhanced EM endurance of TiN/AlCu/TiN/sub x/ interconnection

1994 / IEEE / 0-7803-1908-7
By: Kwan Goo Rha; Jun Ki Kim; Jeong Soo Byun; Woo Shik Kim;

Medium noise property of sputter textured media on carbon substrate

1996 / IEEE
By: Ohashi, K.; Uchida, K.; Kobayashi, I.; Ishii, T.; Sane, Y.; Yamaguchi, K.;

Extremely high linear density recording by perpendicular magnetization

1996 / IEEE
By: Ouchi, K.; Honda, N.; Iwasaki, S.;

Large Barkhausen discontinuity of Co-Fe-Si-B amorphous films sputtered on polymer substrate

1996 / IEEE
By: Oka, K.; Furukawa, S.; Yano, N.; Humphrey, F.B.; Yamasaki, J.; Ogasawara, I.;

Structural, magnetic properties and steep magnetoresistance change with low saturation magnetic fields in Co/Ni multilayer thin films

1996 / IEEE
By: Han, D.H.;

Preparation and piezoresistive characteristics of polycrystalline SnO/sub 2/ films

1995 / IEEE / 0-7803-3622-4
By: Kamimura, K.; Nakao, M.; Ito, H.; Zhan He Wang; Onuma, Y.;

Evaluation of amorphous diamond-like carbon-nitrogen films as wear protective coatings on thin film media and thin film head sliders

1997 / IEEE
By: Judy, J.H.; Ga-Lane Chen; Geng Wang; Sivertsen, J.M.;

Properties of sputtered amorphous silicon/crystalline silicon solar cells

1996 / IEEE / 0-7803-3166-4
By: Anderson, W.A.; Jagannathan, B.;

Low resistance contact to CdTe thin films

1996 / IEEE / 0-7803-3166-4
By: Florez, M.; de la Cruz, W.; Gordillo, G.; Cota, L.; Teheran, P.;

Linear model application for the design of transparent conductive In/sub 2/O/sub 3/ electrodes

1996 / IEEE / 0-7803-3330-6
By: Gross, D.; Axelevitch, A.; Golan, G.; Rabinovitch, E.;

Characteristics of indium oxide films prepared by DC magnetron sputtering

1996 / IEEE / 0-7803-3330-6
By: Golan, G.; Rabinovitch, E.; Axelevitch, A.;

Magnetic and electrical properties of Co-Sm thin films deposited by dc magnetron sputtering

1997 / IEEE
By: Beyers, R.B.; Kellock, A.J.; Salem, J.R.; Cho, H.S.;

In-plane anisotropy in thin-film media analyzed by grazing incidence X-ray diffraction [CoCrTaPt/Cr]

1997 / IEEE
By: Ohsawa, M.; Teranishi, H.; Hirose, T.; Iida, A.; Ueda, A.; Komiya, S.; Ozawa, K.; Ataka, T.; Ishiwata, O.;

Process and characterization of nitrogenated carbon

1997 / IEEE
By: Chao, J.L.; Yang, M.M.; Russak, M.A.;

Photoluminescence and Raman spectroscopy in hydrogenated carbon films

1997 / IEEE
By: Grannen, K.; Jing Gui; Marchon, B.; Robertson, J.; Silva, S.R.P.; Ager, J.W., III; Rauch, G.C.;

Determining critical loads for ultra-thin overcoats using a depth sensing nanoindentation multiple sliding technique

1997 / IEEE
By: Barnard, J.A.; Scharf, T.W.; Hong Deng;

Room temperature GMR studies in (Cr,Ta)/[Au/NiFe]/sub n/ multilayers

1997 / IEEE
By: Tsoukatos, A.; Huai, Y.; Gupta, S.;

Annealing effect of surface magnetic properties in amorphous Co/sub 1-x/Ti/sub x/ thin films

1997 / IEEE
By: Kim, Y.Y.; Lee, S.H.; Yu, S.C.; Lim, W.Y.; Lee, S.J.; Baek, J.S.;

Magnetic properties and interaction effect in sputtered Nd/sub 2/Fe/sub 14/B films

1997 / IEEE
By: Chen, S.K.; Chin, T.S.; Huang, E.Y.; Tsai, J.L.;

Optimized indium oxide films prepared by DC magnetron sputtering

1997 / IEEE
By: Golan, G.; Rabinovitch, E.; Axelevitch, A.;

Characterization of NbN/AlN/NbN tunnel junctions fabricated without intentional heating

1997 / IEEE
By: Polyakov, S.N.; Kupriyanov, M.Yu.; Balashov, D.V.; Iosad, N.N.; Roddatis, V.V.;

Influence of phonon trapping on the performance of NbN kinetic inductance detectors

1997 / IEEE
By: Goghidze, I.G.; Elant'ev, A.I.; Sergeev, A.V.; Menschikov, E.; Gol'tsman, G.N.; Heusinger, M.A.; Renk, K.F.; Semenov, A.D.;

A linear model application for the design of transparent conductive In/sub 2/O/sub 3/ coatings

1997 / IEEE / 0-7803-3664-X
By: Axelevitch, A.; Golan, G.; Rabinovitch, E.;

Crystalline structure and thermoelectric properties versus growing conditions of sputtering-deposited (Bi/sub 1-x/Sb/sub x/)/sub 2/Te/sub 3/ films with 0/spl les/x/spl les/0.85

1997 / IEEE / 0-7803-4057-4
By: Stolzer, M.; Meusel, J.; Bechstein, V.;

Intelligent processing model for the design of multi-parameters microelectronics systems [In/sub 2/O/sub 3/ film growth]

1998 / IEEE / 0-7803-3879-0
By: Axelevitch, A.; Golan, G.; Rabinovitch, E.; Sigalov, B.;

Tantalum silicide sputtering target material for amorphous Ta-Si-N diffusion barrier for Cu metallization

1998 / IEEE / 0-7803-4285-2
By: Ivanov, E.;

Domain structures supported by micron-sized patterned Co/Cu multilayers with AF and FM coupling

1998 / IEEE
By: Jardine, D.B.; Kirk, K.J.; Chapman, J.N.; Aitchison, P.R.; Evetts, J.E.;

Magnetostriction constants of [110] oriented epitaxially grown FeTaN thin films

1998 / IEEE
By: Varga, L.; Doyle, W.D.; Klemmer, T.J.; Jiang, H.;

Ultrathin protective overcoats on magnetic hard disks

1998 / IEEE
By: Yang, M.M.; Ng, G.S.; Anoikin, E.V.; Brown, D.W.; Elings, J.R.; Chao, J.L.;

Magnetic and magneto-optic study of a layered Co/Pt-Dysprosium-iron-garnet system

1998 / IEEE
By: Kirby, R.D.; Meldrim, J.M.; Sellmyer, D.J.; Woollam, J.A.; DeVries, M.J.;

Monte Carlo simulations of the transport of sputtered particles

1998 / IEEE / 0-7803-4909-1
By: Helmersson, U.; Macek, P.; Macek, K.;

Fabrication of nanoscale tungsten tip arrays for scanning probe microscopy-based devices

1998 / IEEE
By: Merchant, P.; Seeger, J.; Kondoh, Y.;

Magnetic properties of nanocomposite Nd/sub 2/Fe/sub 14/B-Fe films

1999 / IEEE
By: Shi-Kun Chen; Jhy-Chau Shih; Tsung-Shune Chin; Jai-Lin Tsai;

Magnetization and magnetic anisotropy in Ni/Pd multilayer films

1999 / IEEE
By: Sung-Chul Shin; Young-Seok Kim; Jong-Ryul Jeong;

Field-anneal effects on magnetic and magnetoresistive properties of Fe-Mn, Ir-Mn and NiO spin valves

1999 / IEEE
By: Lin, T.; Mauri, D.;

Microstructure and magnetic property of Co/Cu multilayers

1999 / IEEE
By: Semenov, L.I.; Komogortsev, S.V.; Turpanov, I.A.; Song, J.H.; Kim, P.D.; Jeong, Y.H.; Karpenko, M.M.;

Low noise properties and thermal stability of Co-based thin film media for high density longitudinal recording

2000 / IEEE
By: Akimoto, H.; Yoshida, Y.; Sato, K.; Okamoto, I.; Abarra, E.N.; Uematsu, Y.;

Structure and morphology of thin Al-layers in resonator's systems after rapid thermal annealing

1999 / IEEE / 0-7803-5400-1
By: Georgieva, V.; Spassov, L.; Marinov, M.;

Magnetic interaction and thermal stability in CoSm thin films

2000 / IEEE
By: Zangari, G.; Zana, I.;

Electrical property investigations of carbon, lubricant, and alternative overcoats of magnetic discs using mercury probe

2000 / IEEE
By: Ren, S.Y.; Chang, S.S.; Hung, Y.;

Low-temperature in-situ growth of high-coercivity Fe-Pt films

2001 / IEEE
By: Hsin-Hsin Hsiao; Jhy-Chau Shih; Tsung-Shune Chin; Jai-Lin Tsai;

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