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Topic: 3 Mtorr
Effect of RF substrate bias on crystalline orientation of chromium and magnetic characteristics of 84% Co-16% Cr films1990 / IEEE
By: Fisher, R.D.; Nelson, C.W.; Heiman, N.; Khan, M.R.;
Longitudinal recording performance of sputtered barium ferrite media on a carbon rigid disk substrate1994 / IEEE
By: Jinshan Li; Hayashi, H.; Rosenblum, S.S.; Sinclair, R.;
Comparison of quarter micron silicon dioxide profile control in electron-cyclotron-resonance and multidipole confined inductively coupled plasmas1995 / IEEE / 0-7803-2669-5
By: Cheng Yang; Meyer, J.A.; Woods, R.C.; Taylor, J.W.;
Magnetization reduction due to oxygen contamination of bias sputtered Fe/sub 35/Co/sub 65/ thin films2002 / IEEE
By: Yu, W.; Laughlin, D.E.; Yingguo Peng; Bain, J.A.;