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Damped Aero-Acoustic Microphone With Improved High-Frequency Characteristics
2014 / IEEE
This item from - IEEE Journal - Engineered Materials, Dielectrics and Plasmas - With the mechanical resonance damped using a perforated back-plate underneath the sensing diaphragm, a piezoresistive aero-acoustic microphone with improved high-frequency characteristics is demonstrated. The sensing diaphragm and the damper back-plate were monolithically integrated in one process flow. The microphone was calibrated using a high-voltage electrical spark-discharge acoustic