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Damped Aero-Acoustic Microphone With Improved High-Frequency Characteristics

By: Zhou, Z.; Wong, M.; Rufer, L.;

2014 / IEEE


This item from - IEEE Journal - Engineered Materials, Dielectrics and Plasmas - With the mechanical resonance damped using a perforated back-plate underneath the sensing diaphragm, a piezoresistive aero-acoustic microphone with improved high-frequency characteristics is demonstrated. The sensing diaphragm and the damper back-plate were monolithically integrated in one process flow. The microphone was calibrated using a high-voltage electrical spark-discharge acoustic N -wave source. A sensitivity of ˜ 0.33~μ V /V/Pa, a bandwidth of ˜ 520~ kHz at 3-dB attenuation, and a significant damping of the mechanical resonance were realized. hfill[2013-0367]