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A novel model order reduction approach for generating efficient nonlinear verilog-a models of mems gyroscopes

By: Parent, A.; Piirainen, T.; Lorenz, G.; Krust, A.;

2015 / IEEE

Description

This item from - IEEE Conference - 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) - This paper reports a novel model-order reduction (MOR) approach for creating fast-running, nonlinear, multiphysics models in Verilog-A. This new approach differs from previous work by creating the reduced order model (ROM) directly from an accurate, nonlinear, multi-physics representation. The mechanical and electrical nonlinearities of the MEMS structure are persevered to capture effects such as quadrature, amplitude-dependent frequency shifting and electrostatic softening. The reduction algorithm has been implemented in the commercial MEMS/IC co-design tool MEMS+. The approach’s effectiveness is validated for a state-ofthe- art, three-axis, capacitive gyroscope from Murata Electronics by comparing simulations of the created Verilog-A model with experimental data.