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Towards substrate removal in quasi-optical Schottky detector arrays

By: Evangelisti, F.; Capellini, G.; Di Gaspare, L.; Carta, S.; Bagni, R.; Foglietti, V.; Ortolani, M.; Notargiacomo, A.; Giovine, E.; Di Gaspare, A.; Casini, R.;

2011 / IEEE / 978-1-4577-0509-0

Description

This item was taken from the IEEE Conference ' Towards substrate removal in quasi-optical Schottky detector arrays ' The beam of planar THz Schottky detectors is strongly concentrated in the dielectric half-space. With the goal of illuminating arrays from the free-space side, we started to investigate substrate removal from both GaAs and Ge-on-Si diode wafers.