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Micromachined tunable vertical-cavity surface-emitting lasers

By: Massengale, A.R.; Sugihwo, F.; Larson, M.C.; Harris, J.S., Jr.;

1996 / IEEE / 0-7803-3393-4


This item was taken from the IEEE Periodical ' Micromachined tunable vertical-cavity surface-emitting lasers ' We report a record continuous wavelength tuning range without mode hopping of up to 2.0% in a vertical-cavity surface-emitting laser (VCSEL) utilizing a monolithically-fabricated electrostatically-movable micromirror. A device with a 30 /spl mu/m square top mirror and 4 /spl mu/m diameter active region exhibits a continuous wavelength range of 19.1 nm near 960 nm for 0-18 V tuning bias, a threshold current less than 0.4 mA, and a quantum efficiency of 6.5%. Microsecond wavelength switching is also observed.