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Millimeter Wave Silicon Device and Integrated Circuit Technology

By: Gombar, A.; Janton, W.M.; Rosen, A.; Stabile, P.J.; Kolan, M.;

1984 / IEEE

Description

This item was taken from the IEEE Periodical ' Millimeter Wave Silicon Device and Integrated Circuit Technology ' Silicon millimeter wave integrated circuit (SIMMWIC) technology has been developed utilizing novel fabrication techniques. These techniques have been applied to IMPATT and PIN diode fabrication schemes, the results of which are presented.