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Gallium In-Diffusion for the Fabrication of Lithium Niobate Optical Waveguides

By: Way-Seen Wang; Wen-Hung Huang;

2007 / IEEE

Description

This item was taken from the IEEE Periodical ' Gallium In-Diffusion for the Fabrication of Lithium Niobate Optical Waveguides ' Gallium oxide used as a diffusion source for the fabrication of lithium niobate optical waveguides is presented. The optical waveguide properties are investigated and the behavior of the in-diffused gallium is characterized by the secondary ion mass spectroscopy. Single-mode single-polarization optical waveguides with low propagation loss at 632.8 and 1550 nm can be obtained. For reference, the diffusion constant and activation energy of the in-diffused gallium atoms are also obtained.