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Polymer MEMS actuators for underwater micromanipulation
By: Lai, K.W.C.; To, T.K.H.; Ho-Yin Chan; Zhou, J.W.L.; Li, W.J.;
2004 / IEEE
Description
This item was taken from the IEEE Periodical ' Polymer MEMS actuators for underwater micromanipulation ' Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.
Related Topics
Electric Fields
Conducting Polymers
Cellular Biophysics
Biological Techniques
Cellular Grippers
Cell Grasping
Polymer Mems Actuators
Underwater Micromanipulation
Inherent Driving Principles
Ionic Conducting Polymer Films Actuator
Stress Gradient
Electric Field
Parylene Thermal Actuator
Thermal Expansion Coefficients
Polyaniline Actuators
Reversible Electromechanical Oxidation-reduction Reaction
Micromechanical Devices
Actuators
Thermal Stresses
Polymer Films
Thermal Conductivity
Thermal Expansion
Voltage
Electrochemical Processes
Laboratories
Conducting Materials
Micromanipulators
Microactuators
Thermal Expansion
Electric Variables Control
Power, Energy And Industry Applications
Engineering
Water Electrolysis