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Independently addressable VCSEL arrays on 3-�m pitch

By: Donaldson, R.M.; Treat, D.W.; Thornton, R.L.; Chua, C.L.;

1998 / IEEE


This item was taken from the IEEE Periodical ' Independently addressable VCSEL arrays on 3-�m pitch ' We present an exceedingly dense linear vertical-cavity surface-emitting laser (VCSEL) array with independently addressable elements on a staggered 3-/spl mu/m pitch. Our devices utilize an all-epitaxial structure and operate at a wavelength of 813 mm with threshold currents below 400 /spl mu/A. The high-packing density is enabled by combining transparent contact technology with a planar laterally oxidized device architecture. The array exhibits low interelement thermal crosstalk and has electrical resistances of 3 M/spl Omega/ between adjacent array elements.