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Author: Grilles, J.-P.
High-Q silicon flexural resonators for vibrating inertial sensors: Investigations of the limiting damping mechanisms2006 / IEEE / 1-4244-0375-8
By: Le Traon, O.; Le Foulgoc, B.; Grilles, J.-P.; Mathias, H.; Parent, A.; Masson, S.; Bosseboeuf, A.; Marty, F.; Bourouina, T.; Parrain, F.;