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Toward Wafer Scale Inductive Characterization of Spin-Transfer Torque Critical Current Density of Magnetic Tunnel Junction Stacks

By: Sievers, S.; Liebing, N.; Schumacher, H.W.; Ocker, B.; Langer, J.; Reiss, G.; Rott, K.; Stobiecki, T.; Skowronski, W.; Pasquale, M.; Serrano-Guisan, S.; Ferreira, R.; Paz, E.; Caprile, A.; Manzin, A.;

2015 / IEEE


This item from - IEEE Transaction - Fields, Waves and Electromagnetics - We explore the prospects of wafer-scale inductive probing of the critical current density j c0 for spin-transfer torque (STT) switching of CoFeB/MgO/CoFeB magnetic tunnel junctions with varying MgO thickness. From inductive measurements, magnetostatic parameters and effective damping are derived and j c0 is calculated based on STT equations. The inductive values compare well with the values derived from current-induced switching measurements on individual nanopillars. Using a wafer-scale inductive probe head could enable wafer probe station-based metrology of j c0 in the future.