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Automated Pick-Place of Silicon Nanowires

By: Sun, Y.; Xie, S.; Luo, J.; Ru, C.; Zhang, Y.; Ye, X.;

2013 / IEEE

Description

This item from - IEEE Transaction - Robotics and Control Systems - Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires's properties. Nanowire pick-place has been typically performed via teleoperation, which is time-consuming and highly skill-dependent. This paper presents an automated approach to the pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system automatically transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowires's electromechanical properties. The performance of the nanorobotic pick-up and placement procedures was experimentally quantified.