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A nano-actuator via cavity-enhanced optical dipole force

By: Liu, A.Q.; Kwong, D.L.; Tsai, J.M.; Kun, X.; Tao, J.F.; Zhang, Q.X.; Cai, H.; Wu, J.;

2012 / IEEE / 978-1-4673-0325-5


This item was taken from the IEEE Conference ' A nano-actuator via cavity-enhanced optical dipole force ' In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.