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Fabrication of Si wire waveguides composed of amorphous Si
By: Kirimura, K.; Hiidome, K.; Wada, Y.; Saiki, K.; Yamaguchi, T.; Kitamura, Y.; Katsuyama, T.; Tsutsui, K.; Ito, Y.; Morita, M.; Takagi, H.; Tokuda, M.;
2011 / IEEE / 978-4-8634-8182-4
This item was taken from the IEEE Conference ' Fabrication of Si wire waveguides composed of amorphous Si ' We have successfully fabricated high-quality Si wire waveguides composed of amorphous Si. The surface bend of the waveguide was fairly reduced by annealing. The loss is 11.7 dB/mm before annealing and the loss is changed to 6.4 dB/mm after annealing, which indicates the importance of the waveguide-surface- imperfection loss.
Optical Device Fabrication
Waveguide Surface Imperfection Loss