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A Fabry-Perot refractometer for chemical vapor sensing by solid-phase microextraction
By: Peter, Y.-A.; Brown, R.S.; Loock, H.-P.; Barnes, J.A.; Poulin, A.; St-Gelais, R.; Zhou, J.; Saunders, J.; Mackey, G.; Leblanc-Hotte, A.;
2011 / IEEE / 978-1-4577-0336-2
This item was taken from the IEEE Conference ' A Fabry-Perot refractometer for chemical vapor sensing by solid-phase microextraction ' The contour lithography method  is used to improve the fabrication yield of previously demonstrated  microfluidic Fabry-Perot (FP) refractive index (RI) sensors. The sensors are then coated with polydimethylsiloxane (PDMS) based polymers to detect vapor analytes by solid-phase microextraction (SPME). Preliminary characterization of devices coated with two different polymers and exposed to xylenes vapors yields a maximum sensitivity of 0.015 nm/ppm and a detection limit below 120 ppm.
Chemical Vapor Sensing
Contour Lithography Method
Microfluidic Fabry-perot Refractive Index Sensors
Vapor Analytes Detection
Sensor Phenomena And Characterization
Optical Device Fabrication
Refractive Index Measurement