Your Search Results

Use this resource - and many more! - in your textbook!

AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.

Experience the freedom of customizing your course pack with AcademicPub!
Not an educator but still interested in using this content? No problem! Visit our provider's page to contact the publisher and get permission directly.

Stainless steel capacitive pressure sensor for high pressure and corrosive media applications

By: Mehregany, M.; Rajgopal, S.; Shih-Shian Ho;

2010 / IEEE / 978-1-4244-5764-9

Description

This item was taken from the IEEE Conference ' Stainless steel capacitive pressure sensor for high pressure and corrosive media applications ' This paper reports an assembly-type, stainless steel (SS) capacitive gage pressure sensor comprising three key elements: two SS dies and a commercial SS Swagelok fitting that also serves as the package. The sensor is realized by placing a patterned silicon dioxide film deposited on the thinner of the two SS dies (diaphragm die) against a silicon nitride film deposited on the other SS die (backing plate) and housing the combination in a Swagelok fitting. Pressure measurements up to 1500 psi have been demonstrated using corrosive and benign media. Tested media include 45% wt. potassium hydroxide (KOH), 25% wt. tetramethylammonium hydroxide (TMAH), deionized (DI) water, and nitrogen gas. Extended-duration tests with a sensor subjected to KOH solution for 30 days demonstrate excellent repeatability. Random pressure fluctuation tests over a 15-day period also demonstrate good repeatability.