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A Piezoelectrically-Actuated Valve for Modulation of Liquid at High Flow Rate Under High Pressure

By: Knobloch, A.; Rajgopal, S.; Mehregany, M.; Kennerly, S.;

2007 / IEEE / 1-4244-0841-5

Description

This item was taken from the IEEE Conference ' A Piezoelectrically-Actuated Valve for Modulation of Liquid at High Flow Rate Under High Pressure ' A MEMS valve implementation is presented as part of a comprehensive liquid fuel modulation system that targets improved NOx emissions in gas turbines. The target metrics require fuel delivery at high flow rates (>10 ml/s) and bandwidths (>100 Hz) against high pressures (>75 psi). A prototype microvalve has been designed and fabricated with conventional micromachining techniques coupled with an off-the-shelf piezoelectric actuator. The device has dimensions of 40 mm × 11 mm × 2.5 mm. Test results demonstrate flow modulation of 15 ml/min at 20 psid and 50 Hz, when the applied sinusoidal voltage to the piezo actuator and therefore the orifice area modulated by the lever arm, was varied between 84 V to 120 V.