Your Search Results

Use this resource - and many more! - in your textbook!

AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.

Experience the freedom of customizing your course pack with AcademicPub!
Not an educator but still interested in using this content? No problem! Visit our provider's page to contact the publisher and get permission directly.

High performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cell

By: Leobandung, E.; Nayakama, H.; Mocuta, D.; Miyamoto, K.; Angyal, M.; Meer, H.V.; McStay, K.; Ahsan, I.; Allen, S.; Azuma, A.; Belyansky, M.; Bentum, R.-V.; Cheng, J.; Chidambarrao, D.; Dirahoui, B.; Fukasawa, M.; Gerhardt, M.; Gribelyuk, M.; Halle, S.; Harifuchi, H.; Harmon, D.; Heaps-Nelson, J.; Hichri, H.; Ida, K.; Inohara, M.; Inouc, I.C.; Jenkins, K.; Kawamura, T.; Kim, B.; Ku, S.-K.; Kumar, M.; Lane, S.; Liebmann, L.; Logan, R.; Melville, I.; Miyashita, K.; Mocuta, A.; O'Neil, P.; Ng, M.-F.; Nogami, T.; Nomura, A.; Norris, C.; Nowak, E.; Ono, M.; Panda, S.; Penny, C.; Radens, C.; Ramachandran, R.; Ray, A.; Rhee, S.-H.; Ryan, D.; Shinohara, T.; Sudo, G.; Sugaya, F.; Strane, J.; Tan, Y.; Tsou, L.; Wang, L.; Wirbeleit, F.; Wu, S.; Yamashita, T.; Yan, H.; Ye, Q.; Yoneyama, D.; Zamdmer, D.; Zhong, H.; Zhu, H.; Zhu, W.; Agnello, P.; Bukofsky, S.; Bronner, G.; Crabbe, E.; Freeman, G.; Huang, S.-F.; Ivers, T.; Kuroda, H.; McHerron, D.; Pellerin, J.; Toyoshima, Y.; Subbanna, S.; Kepler, N.; Su, L.;

2005 / IEEE / 4-900784-00-1

Description

This item was taken from the IEEE Conference ' High performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cell ' A high performance 65 nm SOI CMOS technology is presented featuring 35 nm gate length, 1.05 nm gate oxide, performance enhancement from dual stress nitride liners (DSL), and 10 wiring levels with low-k dielectric offered in the first 8 levels. DSL enhancement is shown to scale well to 65 nm with larger enhancement seen than at 90 nm design rules. A high performance 0.65/spl mu/m/sup 2/ SRAM cell is also presented. SOI allows the SRAM cell to use Metal 1 instead of Metal 2 for bit-line wiring, which lowers the capacitance and improves access times. A functional dual-core microprocessor test chip containing 76Mb SRAM cache and key execution units has been fabricated.