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Sintering process of low temperature cofired ceramics

By: Xu, Z.; Ma, J.; Han, Z.; Li, Y.; Huang, L.; Wang, Q.;

2000 / IEEE / 0-7803-6654-9


This item was taken from the IEEE Conference ' Sintering process of low temperature cofired ceramics ' In order to research the mismatch shrinkage between a package substrate and metal lines, this paper studies the sintering densification process of low temperature cofired glass ceramics. At different phases, the substrate has different shrinkage features: at 0-600/spl deg/C, it shows almost no shrinkage, but it shrinks dramatically from 600/spl deg/C to 900/spl deg/C, by as much as 25%. Furthermore, through calculation of the sintering activation energy, we can conclude that it is the liquid-sintering-mechanism of glass that plays an important role in the sintering process. This work can help to optimize the sintering technology.