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Sintering process of low temperature cofired ceramics
2000 / IEEE / 0-7803-6654-9
This item was taken from the IEEE Conference ' Sintering process of low temperature cofired ceramics ' In order to research the mismatch shrinkage between a package substrate and metal lines, this paper studies the sintering densification process of low temperature cofired glass ceramics. At different phases, the substrate has different shrinkage features: at 0-600/spl deg/C, it shows almost no shrinkage, but it shrinks dramatically from 600/spl deg/C to 900/spl deg/C, by as much as 25%. Furthermore, through calculation of the sintering activation energy, we can conclude that it is the liquid-sintering-mechanism of glass that plays an important role in the sintering process. This work can help to optimize the sintering technology.
Sintering Technology Optimization
Low Temperature Cofired Ceramics
Sintering Densification Process
Low Temperature Cofired Glass Ceramics
Substrate Shrinkage Features
Sintering Activation Energy
Integrated Circuit Packaging