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Ultra-Thin High Quality Oxynitride Formed by NH3 Nitridation and High Pressure O2 Re-oxidation

By: Luo, T.Y.; Kwong, D.L.; Evans, B.; Huff, H.R.; Jackson, M.D.; Karamcheti, A.; Brown, G.A.; Al-Shareef, H.N.; Watt, V.H.C.;

2000 / IEEE / 2-86332-248-6

Description

This item was taken from the IEEE Conference ' Ultra-Thin High Quality Oxynitride Formed by NH3 Nitridation and High Pressure O2 Re-oxidation '