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Measurement of thermal diffusivity of multilayer optical thin film systems using photoacoustic effect
By: Kwon, K.U.; Kim, S.W.; Hahn, S.H.; Choi, M.H.;
1999 / IEEE / 0-7803-5729-9
This item was taken from the IEEE Conference ' Measurement of thermal diffusivity of multilayer optical thin film systems using photoacoustic effect ' Two-layer anti-reflection (AR) and five-layer high-reflection (HR) optical coating samples on glass substrate were designed and fabricated, for different evaporation conditions (coating speeds of 10 and 20 E/s, and substrate temperatures of 50, 100, 150, 200/spl deg/C), using two dielectric materials of MgF/sub 2/ and ZnS which have different refractive indices. The through-plane thermal diffusivity were measured using the photoacoustic effect. The results showed that the thermal diffusivity of the sample fabricated in the conditions of 10 E/s and 150/spl deg/C showed the maximum value and also, it has quite close relations with the microstructure of the film system.
Thermal Variables Measurement
Multilayer Optical Thin Film Systems
Thermal Diffusivity Measurement
Through-plane Thermal Diffusivity
Different Evaporation Conditions
50 To 200 C
Optical Variables Control
Five-layer High-reflection Coatings