Your Search Results

Use this resource - and many more! - in your textbook!

AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.

Experience the freedom of customizing your course pack with AcademicPub!
Not an educator but still interested in using this content? No problem! Visit our provider's page to contact the publisher and get permission directly.

A highly manufacturable corner rounding solution for 0.18 /spl mu/m shallow trench isolation

By: Bude, M.; Klemens, F.P.; Pinto, M.R.; Lloyd, E.J.; Rafferty, C.S.; Liu, C.T.; Baumann, F.H.; Pai, C.S.; Chang, C.P.; Clemens, J.T.; Liu, R.C.; Hillenius, S.J.; Vaidya, H.; Lai, W.Y.C.; Colonell, J.I.; Cheung, K.P.; Miner, J.F.;

1997 / IEEE / 0-7803-4100-7

Description

This item was taken from the IEEE Conference ' A highly manufacturable corner rounding solution for 0.18 /spl mu/m shallow trench isolation ' In this work, we first establish the relationship between corner leakage and corner rounding through device simulation. Then, we demonstrate a novel method to produce corner rounding, using a post-CMP, high temperature re-oxidation process (HTR-STI). A semi-empirical model correlating rounding with re-oxidation and nitride mask thickness is derived from mechanical studies. Finally, we show the electrical properties of devices with HTR-STI for the 0.18 /spl mu/m technology.