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Vacuum arc ion sources with gaseous plasma trigger systems

By: Dickinson, M.R.; MacGill, R.A.; Brown, I.G.; Oks, E.M.; Yushkov, G.Y.; Nikolaev, A.G.;

1996 / IEEE / 0-7803-2906-6


This item was taken from the IEEE Periodical ' Vacuum arc ion sources with gaseous plasma trigger systems ' Triggering systems for vacuum arc plasma sources and ion sources have been developed that make use of a gaseous trigger discharge in a strong magnetic field. Two kinds of trigger discharge configurations have been explored, a Penning discharge and a magnetron discharge. The approach works reliably for low gas pressure in the vacuum arc environment and for long periods of operation between required maintenance: pressures in the mid 10/sup -6/ Torr range and for /spl sim/10/sup 6/ pulses.