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Evaluation for fab performance using CPO

By: Tani, H.; Ogawa, H.; Ito, Y.;

1995 / IEEE / 0-7803-2928-7


This item was taken from the IEEE Periodical ' Evaluation for fab performance using CPO ' We have tried to evaluate the investment effect of a semiconductor device factory by grasping the process cost precisely, classifying its structure, and identifying useless cost factors. As an evaluation index we defined and used the CPO (Cost of Process Ownership), which is the cost per wafer in each process step based on the configuration of equipment installed in the factory and the configuration of product types manufactured there. This index was developed by making some improvements to the CEO (Cost of Equipment Ownership) model. We report the definition of the CPO we are using and some examples of CPO utilization.