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Novel Nanophase-Switching ESD Protection

By: Ru Huang; Wang, A.; Zitao Shi; Qiang Fang; He Tang; Yuhua Cheng; Hui Zhao; Jian Liu; Xin Wang; Lijie Zhang; Lin Lin;

2011 / IEEE


This item was taken from the IEEE Periodical ' Novel Nanophase-Switching ESD Protection ' This letter reports the proof-of-concept results for the new nontraditional nanophase-switching electrostatic-discharge (ESD) protection mechanism and nanocrossbar ESD structures. Experiment shows good ESD switching and protection, i.e., a fast response of 100 ps, a ultralow leakage of 0.26 pA, and an ESD protection of >; 267 V/�m2. A new dispersed local ESD tunneling model is proposed, and heterogeneous complementary metal-oxide-semiconductor integration is developed.