Use this resource - and many more! - in your textbook!
AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.
RF-MEMS Tunable Capacitor With 3 V Operation Using Folded Beam Piezoelectric Bimorph Actuator
By: Nagano, T.; Kawakubo, T.; Itaya, K.; Abe, K.; Nishigaki, M.;
2006 / IEEE
This item was taken from the IEEE Periodical ' RF-MEMS Tunable Capacitor With 3 V Operation Using Folded Beam Piezoelectric Bimorph Actuator ' Tunable capacitors with high tuning range and high Q-factors are indispensable for realizing reconfigurable radio-frequency (RF) circuits for multiband/multimode next-generation mobile wireless communication terminals. A novel RF microelectromechanical systems tunable capacitor having a piezoelectric bimorph actuator has been developed using a complementary metal-oxide-semiconductor compatible surface micromachining process. Folded beam piezoelectric actuators were introduced to cancel curling of the actuator beam due to residual stress. The continuous wide tuning ratio of three was realized at an operation voltage of less than 3 V for the first time
Folded Beam Piezoelectric Bimorph Actuator
Mobile Wireless Communication
Surface Micromachining Process
Radiofrequency Microelectromechanical Systems
Tunable Circuits And Devices
Cmos Integrated Circuits
Components, Circuits, Devices And Systems
Engineered Materials, Dielectrics And Plasmas
Reconfigurable Radio-frequency Circuits