Your Search Results

Use this resource - and many more! - in your textbook!

AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.

Experience the freedom of customizing your course pack with AcademicPub!
Not an educator but still interested in using this content? No problem! Visit our provider's page to contact the publisher and get permission directly.

A survey of automated material handling systems in 300-mm SemiconductorFabs

By: Heragu, S.S.; Agrawal, G.K.;

2006 / IEEE

Description

This item was taken from the IEEE Periodical ' A survey of automated material handling systems in 300-mm SemiconductorFabs ' The fast-paced developments and technological breakthroughs in the semiconductor manufacturing industry elevates the importance of optimum utilization of resources. The newer 300-mm wafers fabs place a high level of emphasis on increasing yield and reducing cycle times. Automated material handling systems are importanttools that help us achieve these objectives. In addition, due to the increased weight and size of 300-mm wafers, an automated material handling system isa must for a 300-mm manufacturing facility. This paper discusses various approaches for automated materials handling in semiconductor manufacturing industries.