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Comparison of effective work function extraction methods using capacitance and current measurement techniques

By: Majhi, P.; Bersuker, G.; Hongfa Luan; Alshareef, H.N.; Kisik Choi; Harris, H.R.; Dim-Lee Kwong; Matthews, K.; BosckeBoscke, T.; Brown, G.A.; Rino Choi; Huang-Chun Wen; Byoung Hun Lee;

2006 / IEEE

Description

This item was taken from the IEEE Periodical ' Comparison of effective work function extraction methods using capacitance and current measurement techniques ' The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within /spl plusmn/ 0.1 eV-in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.