Use this resource - and many more! - in your textbook!
AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.
Comparison of effective work function extraction methods using capacitance and current measurement techniques
By: Majhi, P.; Bersuker, G.; Hongfa Luan; Alshareef, H.N.; Kisik Choi; Harris, H.R.; Dim-Lee Kwong; Matthews, K.; BosckeBoscke, T.; Brown, G.A.; Rino Choi; Huang-Chun Wen; Byoung Hun Lee;
2006 / IEEE
This item was taken from the IEEE Periodical ' Comparison of effective work function extraction methods using capacitance and current measurement techniques ' The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within /spl plusmn/ 0.1 eV-in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.
High K Dielectric Materials
High-k Gate Dielectrics
Metal Gate Electrodes
Terraced Oxide Structures
Effective Work Function Extraction
Electric Current Measurement
Components, Circuits, Devices And Systems
Engineered Materials, Dielectrics And Plasmas