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Characteristics and mechanism of tunable work function gate electrodes using a bilayer metal structure on SiO/sub 2/ and HfO/sub 2/

By: Colombo, L.; Wong, G.M.T.; Ching-Huang Lu; Nishi, Y.; Clemens, B.M.; Deal, M.D.; Chambers, J.J.; Visokay, M.R.; Chi On Chui; Majhi, P.; Tsai, W.;

2005 / IEEE

Description

This item was taken from the IEEE Periodical ' Characteristics and mechanism of tunable work function gate electrodes using a bilayer metal structure on SiO/sub 2/ and HfO/sub 2/ ' In this letter, we investigate a method to adjust the gate work function of an MOS structure by stacking two metals with different work functions. This method can provide work function tunability of approximately 1 eV as the bottom metal layer thickness is increased from 0 to about 10 nm. This behavior is demonstrated with different metal combinations on both SiO/sub 2/ and HfO/sub 2/ gate dielectrics. We use capacitance-voltage (C-V) characteristics to investigate the effect of different annealing conditions and different metal/metal bilayer couples on the work function. By comparing the as-deposited and annealed films, and by comparing with metals that are relatively inert with each other, we deduce that the work function tuning behavior likely involves metal/metal interdiffusion.