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Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al/sub 2/O/sub 3/ refilling process

By: Ishiwata, N.; Matsubara, T.; Nonaka, Y.; Ishi, T.;

1999 / IEEE

Description

This item was taken from the IEEE Periodical ' Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al/sub 2/O/sub 3/ refilling process ' We have developed a focused ion beam trimmed write head using Al/sub 2/O/sub 3/ refilling, in which an Al/sub 2/O/sub 3/ film was deposited and a two-step lapping process was performed after FIB trimming at the air bearing surface. This process provided highly defined pole edges without any rounded corners, well-filled hollows, and a damage-free read element. Good environment-proof characteristics were also obtained, because a diamond-like carbon film was deposited as a protective layer on the element after FIB trimming. The fabricated head showed good overwrite characteristics in half-micron width writing.