Use this resource - and many more! - in your textbook!
AcademicPub holds over eight million pieces of educational content for you to mix-and-match your way.
Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al/sub 2/O/sub 3/ refilling process
By: Ishiwata, N.; Matsubara, T.; Nonaka, Y.; Ishi, T.;
1999 / IEEE
This item was taken from the IEEE Periodical ' Highly defined narrow track write heads fabricated by focused ion beam trimming with the Al/sub 2/O/sub 3/ refilling process ' We have developed a focused ion beam trimmed write head using Al/sub 2/O/sub 3/ refilling, in which an Al/sub 2/O/sub 3/ film was deposited and a two-step lapping process was performed after FIB trimming at the air bearing surface. This process provided highly defined pole edges without any rounded corners, well-filled hollows, and a damage-free read element. Good environment-proof characteristics were also obtained, because a diamond-like carbon film was deposited as a protective layer on the element after FIB trimming. The fabricated head showed good overwrite characteristics in half-micron width writing.
Al/sub 2/o/sub 3/
Highly Defined Narrow Track Write Heads
Alumina Refilling Process
Two-step Lapping Process
Air Bearing Surface
Highly Defined Pole Edges
Damage-free Read Element
Diamond-like Carbon Film
Half-micron Width Writing
Pole Tip Angle
Spin Valve Read Element
Scanning Electron Microscopy
National Electric Code
Focused Ion Beam Technology
Fields, Waves And Electromagnetics