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Electron beam extraction from a broad-beam vacuum-arc metal plasma source
By: Brown, I.G.; Oks, E.M.;
1998 / IEEE
This item was taken from the IEEE Periodical ' Electron beam extraction from a broad-beam vacuum-arc metal plasma source ' We describe experiments demonstrating the formation of a high current electron beam from a vacuum arc plasma. A preexisting vacuum arc ion source was used, with the extraction voltage reversed in polarity so as to form an electron beam rather than an ion beam; no other changes were required. The beam formed was of energy up to 33 keV, beam current up to 70 A, beam diameter about 10 cm, pulse width 500 /spl mu/s, and energy density up to 25 J/cm/sup 2/. This kind of source can be used for material surface modification.
Electron Beam Extraction
Broad-beam Vacuum-arc Metal Plasma Source
High Current Electron Beam
Preexisting Vacuum Arc Ion Source
Material Surface Modification
Plasma Immersion Ion Implantation
Plasma Materials Processing
Engineered Materials, Dielectrics And Plasmas