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Vacuum arc ion sources-a brief historical review

By: Oks, E.M.; Brown, I.G.;

1997 / IEEE


This item was taken from the IEEE Periodical ' Vacuum arc ion sources-a brief historical review ' The production of energetic metal ion beams by vacuum arc ion sources is a subfield of ion beam science and technology that has experienced rapid growth and a great deal of research activity in the last decade or so. Interest in this kind of ion source derives from the high current of metal ions that can be produced-these are the defining and key properties of the source, and they open up areas of application that have not previously been readily accessible. We present a concise history of this field of activity. The background, history, and recent research and development are discussed.