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Vacuum arc ion sources-a brief historical review
By: Oks, E.M.; Brown, I.G.;
1997 / IEEE
This item was taken from the IEEE Periodical ' Vacuum arc ion sources-a brief historical review ' The production of energetic metal ion beams by vacuum arc ion sources is a subfield of ion beam science and technology that has experienced rapid growth and a great deal of research activity in the last decade or so. Interest in this kind of ion source derives from the high current of metal ions that can be produced-these are the defining and key properties of the source, and they open up areas of application that have not previously been readily accessible. We present a concise history of this field of activity. The background, history, and recent research and development are discussed.
Ion Beam Science
Vacuum Arc Ion Sources
Energetic Metal Ion Beams Production
Plasma Immersion Ion Implantation
Plasma Materials Processing
Engineered Materials, Dielectrics And Plasmas