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Deposition andin-situ plasma doping of plasma-polymerized thiophene films using PECVD

By: Ji-Woong Back; Jung-Hyun Lee; Woo-Gwang Jung; Jin-Yeol Kim; Tae-Wook Kim;

2009 / Springer Science+Business Media / 1598-5032


Highly transparent, thin polythiophene (PT) films were successfully synthesized by the plasma polymerization of thiophene. These films were doped with O plasma. The plasma-doped PT films exhibited an increased surface roughness resulting in a decreased contact angle. However, the thickness of the PT layer was partially decomposed and/or etched with increasing voltage above 40 W.