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Author: Torri, K.
A 7.03-/spl mu/m/sup 2/ Vcc/2-plate nonvolatile DRAM cell with a Pt/PZT/Pt/TiN capacitor patterned by one-mask dry etching1996 / IEEE / 0-7803-3342-X
By: Fujisaki, Y.; Sakata, K.; Kure, T.; Yokoyama, N.; Tanaka, T.; Itoga, T.; Gotoh, Y.; Ohkura, M.; Kawakami, H.; Morimoto, T.; Kumihashi, T.; Torri, K.; Kaga, T.; Kisu, T.; Yamashita, H.; Moniwa, M.; Shoji, K.; Kimura, K.;