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Author: Chicotka, S.M.
A highly latchup-immune 1 µm CMOS technology fabricated with 1 MeV ion implantation and self-aligned TiSi1985 / IEEE
By: Zicherman, D.S.; Bucelot, T.J.; Polcari, M.R.; Petrillo, E.J.; Chicotka, S.M.; Petrillo, K.E.; Sun, Y.C.; Taur, Y.; Wang, L.K.; Lai, F.S.;